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壓力傳感器厚膜溫度補(bǔ)償技術(shù)研究
更新時(shí)間：2010-12-06 點(diǎn)擊次數(shù)：1611次
壓力傳感器厚膜溫度補(bǔ)償技術(shù)研究
Thick Film Temperature Compensation Technology of Pressure Sensor LI Ying，LIN Hong，WANG Xue—bing （Shenyang Academy of Instrumentation Science，Shenyang 110043，China） Abstract：Temperature compensation of silicon base pressure sensor were realized by the thick film circuit manufacturing tech— nology，it extended the compensation temperature range and improved the temperature compensation precision．The other perform- ance，such as the reliability，aseismatic capacity，high or low temperature shocking resistance，was also improved．The resistor network principle in the thick film temperature compensation circuit，the thick film circuit design and manufacturing technology and the resistance adjusting method were introduced．According to reasonable circuit，structure and technique design of the thick film circuit，the temperature compensation of the OEM pressure sensor was realized．The thick film temperature compensation technology of pressure sensor was successfully used in the production process． Key words：pressure sensor；temperature compensation；thick film circuit；resistor network
傳感器的厚膜溫度補(bǔ)償技術(shù)就是采用厚膜電路、以陶瓷基 片作為襯底，將溫度補(bǔ)償電阻網(wǎng)絡(luò)制作在陶瓷基片上，并采用 *激光調(diào)阻技術(shù)將補(bǔ)償電阻調(diào)整到目標(biāo)值允許的允差范 圍內(nèi)，和常規(guī)的環(huán)氧樹(shù)脂板補(bǔ)償電路相比，不僅減小了補(bǔ)償電 阻的裝配空問(wèn)，省去了焊接電阻等繁雜的工序，而且阻值修調(diào) 精度高、電路穩(wěn)定可靠，大幅度提高了生產(chǎn)效率，使傳感器在外 觀質(zhì)量、補(bǔ)償精度、抗震性能、穩(wěn)定性、可靠性、性價(jià)比等各方面 都有顯著的改善。
傳感器溫度補(bǔ)償、靈敏度補(bǔ)償原理及厚膜電路的結(jié)構(gòu)設(shè)計(jì)
傳感器的零點(diǎn)溫度補(bǔ)償采用兩點(diǎn)補(bǔ)償。即在傳感器工作 的全溫區(qū)內(nèi)，使起始點(diǎn)溫度的零點(diǎn)值與終止點(diǎn)溫度的零點(diǎn)值相 等，且為零，這種補(bǔ)償方法適合于零點(diǎn)溫漂曲線非線性小的傳 感器。 靈敏度補(bǔ)償是通過(guò)在傳感器供電電源兩端并聯(lián)一電阻R ， 根據(jù)靈敏度溫漂的趨勢(shì)，利用分流原理，在不同的溫度下選擇 不同的供電電流，從而改變溫漂，使傳感器在不同的溫度下的 靈敏度輸出相等來(lái)實(shí)現(xiàn)傳感器的靈敏度溫度補(bǔ)償。
壓力傳感器厚膜溫度補(bǔ)償技術(shù)研究
